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Film-Sense多波長(zhǎng)上海昊量光電推出的多波長(zhǎng)橢偏儀采用長(zhǎng)壽命的LED光源，可分別提供405nm、450nm、465nm、525nm、595nm、635nm、660nm、850nm、950nm六種不同波長(zhǎng)，并使用無(wú)移動(dòng)部件的橢偏儀，緊湊的系統(tǒng)提供快速可靠的薄膜測(cè)量

詳細(xì)介紹

Film-Sense多波長(zhǎng)

上海昊量光電推出的多波長(zhǎng)橢偏儀采用長(zhǎng)壽命的LED光源，可分別提供405nm、450nm、465nm、525nm、595nm、635nm、660nm、850nm、950nm六種不同波長(zhǎng)，并使用無(wú)移動(dòng)部件的橢偏儀，緊湊的系統(tǒng)提供快速可靠的薄膜測(cè)量。

通過(guò)1秒的測(cè)量可以精確的測(cè)量0-5000nm的大多數(shù)透明薄膜的厚度。并可以獲得n和k等光學(xué)常量。

相比于單波長(zhǎng)橢偏儀，多波長(zhǎng)橢偏儀可測(cè)定薄膜厚度，對(duì)于透明薄膜測(cè)量厚度至少可達(dá)5μm，不存在厚度周期性問(wèn)題；可確定樣品其它其它參數(shù)特性例如薄膜粗糙度、多層膜厚度等；對(duì)數(shù)據(jù)分析提供檢測(cè)依據(jù)，一個(gè)良好的分析模型應(yīng)該適用于不同波長(zhǎng)的數(shù)據(jù)；對(duì)于薄的薄膜（<>

應(yīng)用案例：

原位測(cè)量：

AUTFS-1 Mounted on Kurt Lesker ALD Chamber AUT FS-1 Mounted on AJA Sputter Chamber

選配件：

1、聚焦選項(xiàng)：將樣品上的光束縮小至0.8 x 1.9 mm 或0.3 x 0.7 mm

2、聚焦束檢驗(yàn)選項(xiàng)

3、自動(dòng)Mapping系統(tǒng)

產(chǎn)品特點(diǎn)：

多波長(zhǎng)
橢偏檢測(cè)器中無(wú)移動(dòng)部件
優(yōu)異的測(cè)量精度（優(yōu)于0.001nm）
可原位測(cè)量

客戶感言：

“These FS-1 ellipsometers are one of the best upgrades to our atomic layer processing reactors, and have now become an integral part of all our experiments on ALD and ALE."

——Dr. Sumit Agarwal - Colorado School of Mines

“這些FS-1橢偏儀是我們?cè)訉犹幚矸磻?yīng)堆的蕞佳升級(jí)之一，現(xiàn)在已經(jīng)成為我們所有ALD和ALE實(shí)驗(yàn)的組成部分"

——Sumit Agarwal博士-科羅拉多礦業(yè)學(xué)院

“The Film Sense FS-1 in situ ellipsometer has greatly facilitated data acquisition and understanding of the thin film deposition processes in our lab. The instrument was relatively easy to incorporate onto a vacuum chamber, and includes a user-friendly manual and tutorial to explain basic operation. With this tool, we are able to collect much more information during a deposition, including measurements between ALD half-cycles that are not feasible with ex situ techniques. These ellipsometers have become an integral part of our laboratory research, and we look forward to continuing to work with Film Sense in the future."

——Rachel Nye, PhD - student in Chemical Engineering Parsons Research Group, North Carolina State University

“薄膜傳感FS-1原位橢偏儀極大地促進(jìn)了我們實(shí)驗(yàn)室的數(shù)據(jù)采集和對(duì)薄膜沉積過(guò)程的理解。該儀器相對(duì)容易合并到，并包括一個(gè)用戶友好的手冊(cè)和教程來(lái)解釋基本操作。有了這個(gè)工具，我們可以在沉積過(guò)程中收集更多的信息，包括在ALD半個(gè)周期之間的測(cè)量，而這在原位技術(shù)中是不可實(shí)現(xiàn)的。這些橢圓計(jì)已經(jīng)成為我們實(shí)驗(yàn)室研究的一部分，我們期待著在未來(lái)繼續(xù)與Film Sense合作。"

—— 瑞秋·奈，化學(xué)工程博士生帕森斯研究小組，北卡羅萊納州立大學(xué)

“Overall performance, affordability and ease of use has made the FS-1 a workhorse for our ALD process as well as equipment development efforts. The next generation FS-1EX provides a combination of higher beam intensity and wider spectral range improving both precision and accuracy. For metallic thin films such as TiN, Pt and Ru, two additional IR wavelengths enhance the ability to monitor film thickness and resistivity in-situ during growth. This enhanced performance helps us to streamline development efforts by effectively understanding the impact of different process conditions on film quality in real-time."

——Bruce Rayner - Principal Scientist Atomic Layer Deposition, Kurt J. Lesker Company

“FS-1的整體性能、可承受性和易用性使其成為我們ALD工藝和設(shè)備開(kāi)發(fā)的主力。下一代FS-1EX提供了更高的光束強(qiáng)度和更寬的光譜范圍的組合，提高了精度和精度。對(duì)于金屬薄膜，如TiN, Pt和Ru，兩個(gè)額外的IR波長(zhǎng)增強(qiáng)了在生長(zhǎng)過(guò)程中監(jiān)測(cè)薄膜厚度和電阻率的能力。通過(guò)實(shí)時(shí)有效地了解不同工藝條件對(duì)膠片質(zhì)量的影響，這種增強(qiáng)的性能有助于我們簡(jiǎn)化開(kāi)發(fā)工作。"

——Bruce Rayner - Kurt J. Lesker公司原子層沉積科學(xué)家

"The FS-1 is an excellent basic ellipsometer. Reliable, easy to use, low maintenance, and great value for money. Films Sense have been great at helping us characterize our thin films, and get accurate measurements. Fully recommended. "

——Dr Ruy Sebastian Bonilla - Research Fellow Oxford Materials Department

“FS-1是一款優(yōu)良的基礎(chǔ)橢偏計(jì)?？煽?，易于使用，低維護(hù)，和巨大的價(jià)值?！癋ilm Sense"在幫助我們描述我們的薄膜和獲得精確的測(cè)量方面做得很好。推薦。"

——Ruy Sebastian Bonilla博士-牛津大學(xué)材料系研究員

“We have purchased four Film Sense products for our small R&D group. We have three FS-1 units and one FS-1EX unit with the RT300 mapping stage. The Film Sense software is the most intuitive and easiest to use of all the ellipsometers I have experience using. Our favorite feature is the multi-sample analysis method. This feature allows you to determine the optical constants for new or poorly fitting films by simply measuring a small number of samples with various thicknesses. Having knowledge of the actual thickness values is not even necessary. The software understands the optical constants must be the same for all samples, and each sample varies only in thickness. The user just needs to collect the data and press the fit button. New films layers are created in just a couple of minutes. We also love the automatic adjustment for sample height on the RT300 mapping stage. Our process engineers are constantly adjusting the height on competitor’s units without this automatic feature."

——Staff Systems Engineer at large semiconductor OEM

“我們已經(jīng)為我們的小研發(fā)團(tuán)隊(duì)購(gòu)買了四款Film Sense產(chǎn)品。我們有三個(gè)FS-1單元和一個(gè)FS-1EX單元與RT300繪圖階段。在我使用過(guò)的所有橢偏儀中，F(xiàn)ilm Sense軟件是蕞直觀和蕞容易使用的。我們蕞喜歡的特征是多樣本分析方法。這個(gè)特性允許您通過(guò)簡(jiǎn)單地測(cè)量少量不同厚度的樣品來(lái)確定新的或不合適的薄膜的光學(xué)常數(shù)。甚至沒(méi)有必要了解實(shí)際厚度值。該軟件理解所有樣品的光學(xué)常數(shù)必須相同，并且每個(gè)樣品只在厚度上變化。用戶只需要收集數(shù)據(jù)并按下適合按鈕。只需幾分鐘就能創(chuàng)建出新的膠片層。我們也喜歡在RT300繪圖臺(tái)上自動(dòng)調(diào)整樣品高度。我們的工藝工程師一直在調(diào)整競(jìng)爭(zhēng)對(duì)手產(chǎn)品的高度，但沒(méi)有這種自動(dòng)功能。"

——大型半導(dǎo)體OEM的系統(tǒng)工程師

"The Film Sense FS-1 is a powerful and reliable tool for in-situ characterization of ALD films. The real-time dynamic thickness measurements were critical to understanding the growth characteristics of multicomponent oxides, such as lead zirconate-titanate (PZT), which I studied for my dissertation research through the University of Maryland. The in-situ thickness data I collected with the FS-1 allowed me to screen precursors much more quickly than if I had to rely on ex-situ characterization methods. I continuously used the FS-1 for over five years and haven't experienced any downtime other than during occasional realignments when switching from ex-situ to in-situ measurement modes. The FS-1 would make a valuable addition to any laboratory looking to enhance their nondestructive thin-film thickness measurement capability."

——Nicholas A Strnad, Ph. D.

“Film Sense FS-1是一種強(qiáng)大而可靠的ALD薄膜原位表征工具。實(shí)時(shí)動(dòng)態(tài)厚度測(cè)量對(duì)于了解鋯鈦酸鉛(PZT)等多組分氧化物的生長(zhǎng)特性至關(guān)重要，這是我在馬里蘭大學(xué)進(jìn)行論文研究時(shí)所研究的。與非原位表征方法相比，我使用FS-1收集的原位厚度數(shù)據(jù)使我能夠更快地篩選前體。我連續(xù)使用FS-1五年多了，除了從原位測(cè)量模式切換到原位測(cè)量模式時(shí)偶爾進(jìn)行重新調(diào)整外，沒(méi)有經(jīng)歷過(guò)任何停機(jī)。FS-1將為任何希望增強(qiáng)其無(wú)損薄膜厚度測(cè)量能力的實(shí)驗(yàn)室提供有價(jià)值的補(bǔ)充。"
——Nicholas A Strnad博士

"To summarize our nearly 5-year ownership experience of the FS-1 tool, all I can say, it’s most probably by far the highest performance/cost tool I have ever acquired in my independent research career. Besides the tool itself, as an ellipsometry expert, Film Sense has been very responsive to our data analysis/fit inquiries and saved us valuable research time by sharing his expertise. We are looking forward to getting their latest generation system with additional features that we can integrate for good on either of the reactors. Right now, our single FS-1 tool is going back-and-forth between thermal and plasma reactor based on our needs."

——Necmi Biyikli, Assistant Professor,
Electrical and Computer Engineering, University of Connecticut

“總結(jié)我們對(duì)FS-1工具近5年的擁有經(jīng)驗(yàn)，我只能說(shuō)，它可能是迄今為止我在獨(dú)立研究職業(yè)生涯中獲得的性能/成本蕞高的工具。除了工具本身，作為一個(gè)橢偏儀專家，F(xiàn)ilm Sense已經(jīng)非常響應(yīng)我們的數(shù)據(jù)分析/合適的詢問(wèn)，并通過(guò)分享他的專業(yè)知識(shí)節(jié)省了我們寶貴的研究時(shí)間。我們期待著得到他們的系統(tǒng)，附加的功能，我們可以在任何一個(gè)反應(yīng)堆上集成。現(xiàn)在，我們單一的FS-1工具正在根據(jù)我們的需要在熱反應(yīng)堆和等離子反應(yīng)堆之間來(lái)回切換。"
—— Necmi Biyikli助理教授電子與計(jì)算機(jī)工程，康涅狄格大學(xué)

"The system (FS-XY150) is great and we are having an increase of users using it. I am happy with the system and I direct users to use it when I am training them on our ALD deposition system. It gives great results and the customer support is quick and helpful too."

——Tony Whipple, Scientist Minnesota Nano Center

“這個(gè)系統(tǒng)(FS-XY150)很棒，越來(lái)越多的用戶在使用它。我對(duì)系統(tǒng)很滿意，我指導(dǎo)用戶使用它時(shí)，我正在培訓(xùn)他們對(duì)我們的ALD沉積系統(tǒng)。它能帶來(lái)很好的結(jié)果，客戶支持也很快很有幫助。"
——托尼·惠普爾，科學(xué)家明尼蘇達(dá)納米中心

關(guān)鍵詞：橢偏儀數(shù)據(jù)采集