JDS-1立式接觸式干涉儀
本儀器是一種采用量塊或標準零件借以高精度的比較方式的立式精密長度計量儀器。主要用于150mm以下塊規(guī),亦可用作高精密度的長度和外徑的精密測量,是各級計量室的基本長度計量儀器之一。
JDS-1 Interferometer is applicable for measurement of 3-4 grade gauge blocks or precision sizes up to 150 mm by high-precision comparison with a higher grade of gauge block or a standard reference component. It is one of the basic length-metrological instruments.
and cylinders.
JDS-1立式接觸式干涉儀技術(shù)參數(shù):
被測件長度 Max. measured length | 150 mm |
工作臺行程 Lifting range of worktable
| 5 mm |
測桿移動范圍 | 0.5mm |
分劃板刻度范圍 | ±50格 |
直接測量范圍 Measuring range | 5-20μm |
分度值調(diào)整范圍 Adjusting range of grad | 0.05-0.2 μm
|
推薦使用分度值Recommended grad | 0.1 μm
|
測量壓力 Measuring force | (1.5±0.1) N |
儀器示值穩(wěn)定性 Indication reliability | 0.02 μm
|
儀器誤差 Indication error
| 數(shù)字顯示 Digital display |
測量誤差 Max.measurement error | | | | | n 是格數(shù), i是格值,λ是濾光片中心波長,△λ是濾光片波長誤差 n is number of divisions, i is division value △λ is error of wavelength | | |
儀器體積 Dimensions
| 280×500×700 mm |
儀器重量 Weight
| 40 kg |
標準配件 Standard attachments | | | 五筋園臺Five-Rib circular stage 九筋瑪瑙臺Agate stage 可調(diào)園平臺Adjustable planar stage 輔助臺Auxiliary stage, fixed 平面測帽Planar contact tip, Ф2 小球面測帽Small spherical contact tip 干涉濾光片 Wavelength filter | | | |
JDS-1立式接觸式干涉儀工作原理:
利用光學(xué)杠桿的放大原理,將微小的位移量轉(zhuǎn)換為光學(xué)影象的移動。其工作原理如左圖所示。