1、膜厚儀專用SRP-4面銅探頭是CMI563/CMI700專用的表面銅測試探頭,SRP-4面銅探頭由探針和探頭線組成,探針使用壽命輕松達到30萬次,當探針使用達到后,只需要更換探針即可,無需更換整條線組,大大的降低了客戶使用成本。
2、參數(shù):
精確度:化學銅:標準差0.2%,電鍍銅:標準差0.3%
分辨率:0.1μm≥10μm,0.01μm<10μm,0.001μm<1μm,0.01mils≥1 mil,0.001mils<1mil
厚度測量范圍:化學銅:0.25μm–12.7μm(10μin–500μin)
電鍍銅:2.5μm–254μm(0.1mil–10mil)
線性銅線寬范圍:203μm–7620μm(8mil–300mil)。