產(chǎn)品特點(diǎn):
•完整的硬件和軟件包的自動(dòng)化,多位置測量和繪圖的半導(dǎo)體晶圓
•8 " (200-mm)和12 " (300-mm)半導(dǎo)體晶圓處理
•可選鑲嵌件,適用于2 - 12英寸的晶圓片
•EPI、BPSG、氧和碳測定
•鏡面反射和透射采樣-標(biāo)準(zhǔn)
•可清洗附件,用于去除大氣干擾
•USB控制器接口
PART NUMBER | DESCRIPTION |
016-28XX | MappIR Automated Semiconductor Wafer Accessory for 8" Wafers |
017-28XX | MAP300 Automated Semiconductor Wafer Accessory for 12" Wafers |
Options for the MappIR and MAP300 Accessories | |
073-3880 | Additional 8" Wafer Mount (MappIR only) |
073-3800 | Blank Support – for custom wafers (MappIR only) |
017-3912 | Additional 12" Wafer Mount (MAP300 only) |
017-3980 | Insert to Support 8" Wafer (MAP300 only) |
073-3860 | Insert to Support 6" Wafer |
073-3850 | Insert to Support 5" Wafer |
073-3840 | Insert to Support 4" Wafer |
073-3830 | Insert to Support 3" Wafer |
073-3820 | Insert to Support 2" Wafer |